Computational measuring instrument quality qualification

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computational measurement instrument uses high-precision algorithms and multi-dimensional data fusion as its core principles. By optimizing sensor calibration accuracy, data processing models and hardware anti-interference design, it achieves high-resolution measurement of complex parameters, multi-modal data collaboration and cross-platform compatibility. It is widely used in precision manufacturing, quantum computing, biomedicine and space exploration and other fields. In chip manufacturing, it is used for sub-nanometer level detection of overlay errors in photolithography machines; in the aerospace field, it is used to meet the high-frequency dynamic monitoring of engine blade microstrain; in medical equipment, it is used to ensure accurate calibration of MRI magnetic field uniformity. Compared with traditional instruments, computational measuring instruments have features such as intelligent correction, data encryption, and cloud collaboration. They are core tools for modern high-precision technology research and development and industrial upgrading.

Zhongke Testing is a product quality appraisal service organization registered with the court. It can provide quality appraisal services for computing measuring instruments. It has a professional appraisal team and advanced instruments and equipment to provide fair and accurate appraisal results for the quality appraisal of computing measuring instruments.

As the complexity of measurement technology increases, related disputes have increased significantly. The judicial dispute focuses on:

1, performance index dispute: whether the measurement uncertainty meets the standard, insufficient dynamic sampling rate;

2, material defects: the aging rate of the reference sensor exceeds the standard, photoelectric detection The quantum efficiency of the detector;

3, process problems: optical platform vibration isolation failure, ADC chip integral nonlinearity;

4, contract performance dispute: the core algorithm or hardware module does not comply with the technical agreement.

0 Such cases require benchmark traceability, full-link error analysis, and software and hardware collaborative verification to clearly define quality responsibility.

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The quality appraisal of computing measuring instruments mainly adopts the following technical methods:

1. Functional verification: Check whether the equipment can normally perform its specified functions, such as data acquisition, signal processing, data analysis, etc.

2. Accuracy calibration: Use standards or calibration equipment to calibrate and verify the measurement accuracy of the equipment to ensure the accuracy of the measurement results.

3. Performance test: Conduct performance tests on the equipment under different working conditions to examine its working stability, anti-interference and other indicators.

4. Appearance inspection: Check the appearance and internal structure of the device to confirm whether there are any material defects, manufacturing defects or damage.

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A chip factory of the applicant signed a "Sub-nanometer Profiler Procurement Contract" with an instrument manufacturer of the respondent, and it was agreed that the step height measurement error should be ≤0.3nm. The repeatability of grating lines has been out of whack many times during use, and the manufacturer argued that it was caused by air flow disturbance in the workshop.

Identification analysis results:

The quality analysis expert group discussed and comprehensively analyzed the relevant information of "Computing Measuring Instruments", contract technical agreements, on-site investigation case materials and other data, and made the following quality analysis opinions:

The interferometer reference mirror shape error of the calculation and measuring instrument involved in the case is λ/20 (protocol ≤λ/50), resulting in a phase solution deviation; the nonlinearity of the piezoelectric ceramic micro-displacer is >1% (protocol ≤0.5%), and the closed-loop control residual error reaches 0.5nm; the software noise reduction algorithm does not use wavelet transform according to the protocol, resulting in a 6dB decrease in signal-to-noise ratio.

The appraisal conclusion determined that defects in the optical system and algorithm were the main causes of the out-of-tolerance.

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The quality appraisal report of computing measuring instruments should include:

1, the purpose of the appraisal (such as attribution of measurement disputes, technical compliance verification) and cited standards (JJF 1464, ISO 5725, etc.);

2, instrument model involved, software version, calibration certificate;

3, detection method and equipment list (such as laser wavelength meter, quantum voltage reference);

4. Analysis of the correlation between test data and failure (such as the influence of reference mirror shape error on step measurement);

05. Clarify the conclusion and technical basis for quality responsibility determination;

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26. Qualification certificate of the appraiser’s metrologist/engineer and the official seal of the organization.

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