Quality identification of traceability equipment

quantity value traceability equipment takes measurement reference transmission and uncertainty control as its core principles. By optimizing the stability of the standard, the traceability of the measurement chain and the environmental parameter compensation algorithm, it achieves the synergy of measurement accuracy, repeatability and traceability of the international unit system. It is widely used in metrology institutes, high-end manufacturing, medical testing, aerospace and other fields. In the field of metrology, it is used to transfer values from national benchmarks to working standards; in semiconductor manufacturing, it ensures the traceability of nanoscale measurements of wafer dimensions; in medical equipment calibration, it meets the mandatory verification requirements for vital signs monitoring instruments. Compared with ordinary measuring instruments, value traceability equipment has the characteristics of a complete uncertainty assessment system, excellent long-term stability, and wide environmental adaptability. It is the technical cornerstone of global mutual recognition of measurement results.

Zhongke Testing is a product quality appraisal service organization registered with the court. It can provide quality appraisal services for traceability equipment. It has a professional appraisal team and advanced instruments and equipment to provide fair and accurate appraisal results for quality appraisal of traceability equipment.

As the demand for mutual recognition of global quality systems increases, related dispute cases have increased significantly. The judicial dispute focuses on:

1, performance index dispute: whether the measurement uncertainty meets the standard, lack of traceability of the calibration certificate;

2, material defects: the temperature coefficient of the reference resistance exceeds the standard, and the quality of the quantum voltage device Josephson junction failure;

3, process issues: temperature field uniformity deviation of constant temperature bath, vibration isolation efficiency of vibration isolation system;

4, contract performance dispute: equipment certification scope, software algorithm and technical agreement are inconsistent.

0 Such cases require value comparison, long-term stability testing and reference material verification to clarify the quality responsibility.

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1, instrument performance test:

Accept the performance indicators of the value traceability equipment, such as accuracy, precision, stability, etc., and compare them with national or industry standards.

2, traceability chain detection:

Verify the calibration and traceability chain of the equipment to ensure that it maintains effective contact with national or international standards.

3, on-site inspection:

0 Conduct on-site inspections on the equipment’s usage environment, operating procedures, maintenance records, etc., to eliminate the impact of human or environmental factors on equipment quality.

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A chip factory of the applicant signed a "Wafer Size Measurement System Procurement Contract" with a metrology company of the respondent, agreeing that the measurement uncertainty is ≤0.5nm. After being put into production, many batches of wafers were scrapped due to out-of-tolerance dimensions. The manufacturer argued that this was caused by operators not preheating at a constant temperature.

identification analysis results:

The quality analysis expert group discussed and comprehensively analyzed the relevant information of the "quantity traceability equipment", contract technical agreement, on-site inspection case materials and other data, and made the following quality scores Analytical opinion:

The equipment laser interferometer traceability certificate of the volume traceability equipment involved in the case does not cover the 0.1nm level (actual use requirement is 0.5nm), the temperature control system fluctuates ±0.2°C (agreement ±0.05°C); the repeatability test error is 1.2nm (agreement ≤ 0.5nm).

The appraisal conclusion concluded that the incomplete traceability chain of the equipment and temperature control defects were the main reasons for the deviation.

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The value traceability equipment quality appraisal report should include:

1, appraisal purpose and reference standards;

2, specification of the pipe involved, production batch number, construction record;

3, inspection List of methods and equipment;

4, analysis of correlation between test data and failure;

05, clear conclusion and technical basis for quality responsibility determination;

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26, signature of appraiser, professional qualification certificate and official seal of the organization.

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